The Institute for Electronics and Nanotechnology (IEN) at Georgia Tech will offer a short course on micro-fabrication from August 14 - 16, 2017. This in­tensive 3 day short course combines classroom lectures and laboratory based hands-on fabrication in the IEN cleanroom. The goal of the course is to impart a basic understanding of the science and technology of micro-fabrication processes as used in academia and industry.

This short course will cover essential micro-fabrication techniques including, photolithography, thin film deposition, etching, packaging, and characterization. Attendees will gain valuable experience by fabricating simple devices in one of the most advanced uni­versity cleanrooms in North America.

Target Audience: Attendance is open to the general technical community and is not limited to current Georgia Tech students or IEN users. Anyone interested in cleanroom fabrication techniques is strongly encouraged to attend this course. The course is suitable for both new and experienced researchers interested in micro-fabrication techniques and applications.

A course emphasis will be placed on IEN cleanroom resources, however, the concepts and techniques discussed are applicable to a broad array of research in this field.

Agenda :

August the 14th

8:00AM - 8:30AM: Registration and Continental Breakfast  

8:30AM - 9:00AM: Course Introduction 

9:00AM - 10:30AM: Cleanroom Orientation 

10:30AM - 10:45AM: Break

10:45AM - 11:45AM: Photolithography 

11:45AM - 1:00PM: Lunch

1:00PM - 4:30PM: Group Lab Session

August the 15th   

8:30AM - 9:30AM: CVD Deposition 

9:30AM - 9:45AM: Break 

9:45AM - 10:45AM: PVD Deposition 

10:45AM - 11:00AM: Break 

11:00AM - 12:00PM: Wet Etching & Dry Etching 

12:00PM - 1:00PM: Lunch 

1:00PM - 4:30PM:  Group Lab Session

August the 16th 

8:30AM -  9: 30AM: Oxidation & Diffusion

9:30AM - 9:45AM: Break

9:45AM - 10:45AM: Packaging

10:45AM - 11:00AM: Break

11:00AM - 12:00PM: Characterization & Testing

12:00PM - 1:00PM Lunch

1:00 pm – 4:30 pm – Group Lab Session

Register Here