{"593757":{"#nid":"593757","#data":{"type":"event","title":"  Summer 2017 IEN Micro-Fabrication Short Course","body":[{"value":"\u003Cdiv\u003E\u0026nbsp;\r\n\u003Cp\u003EThe Institute for Electronics and Nanotechnology (IEN) at Georgia Tech will offer a short course on micro-fabrication from August 14 - 16, 2017. This in\u0026shy;tensive 3 day short course combines classroom lectures and laboratory based hands-on fabrication in the IEN cleanroom. The goal of the course is to impart a basic understanding of the science and technology of micro-fabrication processes as used in academia and industry.\u003C\/p\u003E\r\n\r\n\u003Cp\u003EThis short course will cover essential micro-fabrication techniques including, photolithography, thin film deposition, etching, packaging, and characterization. Attendees will gain valuable experience by fabricating simple devices in one of the most advanced uni\u0026shy;versity cleanrooms in North America.\u003C\/p\u003E\r\n\r\n\u003Cp\u003ETarget Audience: Attendance is open to the general technical community and is not limited to current Georgia Tech students or IEN users. Anyone interested in cleanroom fabrication techniques is strongly encouraged to attend this course. The course is suitable for both new and experienced researchers interested in micro-fabrication techniques and applications.\u003C\/p\u003E\r\n\r\n\u003Cp\u003EA course emphasis will be placed on IEN cleanroom resources, however, the concepts and techniques discussed are applicable to a broad array of research in this field.\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cstrong\u003EAgenda :\u003C\/strong\u003E\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cstrong\u003EAugust the 14th\u003C\/strong\u003E\u003C\/p\u003E\r\n\r\n\u003Cp\u003E8:00AM - 8:30AM: Registration and Continental Breakfast \u0026nbsp;\u003C\/p\u003E\r\n\r\n\u003Cp\u003E8:30AM - 9:00AM: Course Introduction\u0026nbsp;\u003C\/p\u003E\r\n\r\n\u003Cp\u003E9:00AM - 10:30AM: Cleanroom Orientation\u0026nbsp;\u003C\/p\u003E\r\n\r\n\u003Cp\u003E10:30AM - 10:45AM: Break\u003C\/p\u003E\r\n\r\n\u003Cp\u003E10:45AM - 11:45AM: Photolithography\u0026nbsp;\u003C\/p\u003E\r\n\r\n\u003Cp\u003E11:45AM - 1:00PM: Lunch\u003C\/p\u003E\r\n\r\n\u003Cp\u003E1:00PM - 4:30PM: Group Lab Session\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cstrong\u003EAugust the 15th \u003C\/strong\u003E\u003Cstrong\u003E\u0026nbsp;\u0026nbsp;\u003Cstrong\u003E \u003C\/strong\u003E\u003C\/strong\u003E\u003C\/p\u003E\r\n\r\n\u003Cp\u003E8:30AM - 9:30AM: CVD Deposition\u0026nbsp;\u003C\/p\u003E\r\n\r\n\u003Cp\u003E9:30AM - 9:45AM: Break\u0026nbsp;\u003C\/p\u003E\r\n\r\n\u003Cp\u003E9:45AM - 10:45AM: PVD Deposition\u0026nbsp;\u003C\/p\u003E\r\n\r\n\u003Cp\u003E10:45AM - 11:00AM: Break\u0026nbsp;\u003C\/p\u003E\r\n\r\n\u003Cp\u003E11:00AM - 12:00PM: Wet Etching \u0026amp; Dry Etching\u0026nbsp;\u003C\/p\u003E\r\n\r\n\u003Cp\u003E12:00PM - 1:00PM: Lunch\u0026nbsp;\u003C\/p\u003E\r\n\r\n\u003Cp\u003E1:00PM - 4:30PM:\u0026nbsp; Group Lab Session\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cstrong\u003EAugust the 16th\u003C\/strong\u003E\u003Cstrong\u003E\u0026nbsp;\u003C\/strong\u003E\u003C\/p\u003E\r\n\r\n\u003Cp\u003E8:30AM -\u0026nbsp; 9: 30AM: Oxidation \u0026amp; Diffusion\u003C\/p\u003E\r\n\r\n\u003Cp\u003E9:30AM - 9:45AM: Break\u003C\/p\u003E\r\n\r\n\u003Cp\u003E9:45AM - 10:45AM: Packaging\u003C\/p\u003E\r\n\r\n\u003Cp\u003E10:45AM - 11:00AM: Break\u003C\/p\u003E\r\n\r\n\u003Cp\u003E11:00AM - 12:00PM: Characterization \u0026amp; Testing\u003C\/p\u003E\r\n\r\n\u003Cp\u003E12:00PM - 1:00PM Lunch\u003C\/p\u003E\r\n\r\n\u003Cp\u003E1:00 pm \u0026ndash; 4:30 pm \u0026ndash; Group Lab Session\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u0026nbsp;\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Ca href=\u0022http:\/\/events.r20.constantcontact.com\/register\/event?llr=m48bm8rab\u0026amp;oeidk=a07edz1vd6k5ad9613c\u0022\u003E\u003Cstrong\u003ERegister Here\u003C\/strong\u003E\u003C\/a\u003E\u003C\/p\u003E\r\n\u003C\/div\u003E\r\n","summary":null,"format":"limited_html"}],"field_subtitle":"","field_summary":"","field_summary_sentence":[{"value":"This in\u00adtensive 3 day short course combines classroom lectures and laboratory based hands-on fabrication in the IEN cleanroom. The goal of the course is to impart a basic understanding of the science and technology of micro-fabrication processes."}],"uid":"27863","created_gmt":"2017-07-27 14:30:22","changed_gmt":"2017-07-27 14:31:12","author":"Christa Ernst","boilerplate_text":"","field_publication":"","field_article_url":"","field_event_time":{"event_time_start":"2017-08-14T09:00:00-04:00","event_time_end":"2017-08-14T17:30:00-04:00","event_time_end_last":"2017-08-14T17:30:00-04:00","gmt_time_start":"2017-08-14 13:00:00","gmt_time_end":"2017-08-14 21:30:00","gmt_time_end_last":"2017-08-14 21:30:00","rrule":"RRULE:FREQ=DAILY;INTERVAL=1;UNTIL=20170817T035959Z;WKST=SU","timezone":"America\/New_York"},"extras":[],"groups":[{"id":"213791","name":"3D Systems Packaging Research Center"},{"id":"198081","name":"Georgia Electronic Design Center (GEDC)"},{"id":"197261","name":"Institute for Electronics and Nanotechnology"},{"id":"1271","name":"NanoTECH"},{"id":"213771","name":"The Center for MEMS and Microsystems Technologies"}],"categories":[],"keywords":[{"id":"166968","name":"the Institute for Electronics and Nanotechnology"},{"id":"2557","name":"mems"},{"id":"10463","name":"microfabrication"},{"id":"168380","name":"the School of Electrical and Computer Engineering"},{"id":"173625","name":"The School of Mechanical Engineering"},{"id":"249","name":"Biomedical Engineering"},{"id":"107","name":"Nanotechnology"},{"id":"167066","name":"sensors"},{"id":"171078","name":"School of Materials Sciences and Engineering"}],"core_research_areas":[],"news_room_topics":[],"event_categories":[{"id":"10377","name":"Career\/Professional development"},{"id":"1795","name":"Seminar\/Lecture\/Colloquium"},{"id":"26411","name":"Training\/Workshop"}],"invited_audience":[{"id":"78761","name":"Faculty\/Staff"},{"id":"78771","name":"Public"},{"id":"174045","name":"Graduate students"},{"id":"78751","name":"Undergraduate students"}],"affiliations":[],"classification":[],"areas_of_expertise":[],"news_and_recent_appearances":[],"phone":[],"contact":[{"value":"\u003Cp\u003EHang Chen: hang.chen@ien.gatech.edu\u003C\/p\u003E\r\n","format":"limited_html"}],"email":[],"slides":[],"orientation":[],"userdata":""}}}