IEN Special Technical Presentation: Elionix Electron Beam Lithography Systems

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We cordially invite those interested in electron beam lithography to join us on Tuesday August 9th, from 2:00 to 4:00pm in the Marcus Nanotechnology Building, Room 1117-1118, for a presentation by Elionix on their line of Electron Beam Lithography (EBL) systems. Representatives from Elionix will highlight the specifications, the features, and give examples of the performance of their EBL systems.

Since 1975, Elionix has been manufacturing, installing, and servicing Electron Beam Lithography systems. During that time, Elionix has sold over 400 EBL systems to research institutes and industrial customers. The Elionix electron beam lithography tools are known for ultra-high precision to fabricate small nano-structures, excellent reliability, small footprint, and a low cost of ownership.


  • Workflow Status:Published
  • Created By:Christa Ernst
  • Created:08/03/2016
  • Modified By:Fletcher Moore
  • Modified:04/13/2017