{"559001":{"#nid":"559001","#data":{"type":"event","title":"IEN Special Technical Presentation: Elionix Electron Beam Lithography Systems","body":[{"value":"\u003Cp\u003EWe cordially invite those interested in electron beam lithography to join us on Tuesday August 9th,\u0026nbsp;from 2:00 to 4:00pm in the Marcus Nanotechnology Building, Room 1117-1118, for a presentation by\u0026nbsp;Elionix on their line of Electron Beam Lithography (EBL) systems. Representatives from Elionix will\u0026nbsp;highlight the specifications, the features, and give examples of the performance of their EBL systems.\u003C\/p\u003E\u003Cp\u003ESince 1975, Elionix has been manufacturing, installing, and servicing Electron Beam Lithography\u0026nbsp;systems. During that time, Elionix has sold over 400 EBL systems to research institutes and industrial\u0026nbsp;customers. The Elionix electron beam lithography tools are known for ultra-high precision to\u0026nbsp;fabricate small nano-structures, excellent reliability, small footprint, and a low cost of ownership.\u003C\/p\u003E","summary":null,"format":"limited_html"}],"field_subtitle":"","field_summary":"","field_summary_sentence":[{"value":"We cordially invite those interested in electron beam lithography to join us on Tuesday August 9th, from 2:00 to 4:00pm in the Marcus Nanotechnology Building, Room 1117-1118, for a presentation by Elionix on their line of Electron Beam Lithography (EBL)s."}],"uid":"27863","created_gmt":"2016-08-03 13:55:47","changed_gmt":"2017-04-13 21:15:13","author":"Christa Ernst","boilerplate_text":"","field_publication":"","field_article_url":"","field_event_time":{"event_time_start":"2016-08-09T15:00:00-04:00","event_time_end":"2016-08-09T17:00:00-04:00","event_time_end_last":"2016-08-09T17:00:00-04:00","gmt_time_start":"2016-08-09 19:00:00","gmt_time_end":"2016-08-09 21:00:00","gmt_time_end_last":"2016-08-09 21:00:00","rrule":null,"timezone":"America\/New_York"},"extras":[],"groups":[{"id":"1271","name":"NanoTECH"},{"id":"197261","name":"Institute for Electronics and Nanotechnology"},{"id":"198081","name":"Georgia Electronic Design Center (GEDC)"},{"id":"213771","name":"The Center for MEMS and Microsystems Technologies"},{"id":"213791","name":"3D Systems Packaging Research Center"}],"categories":[],"keywords":[{"id":"7574","name":"lithography"},{"id":"93011","name":"microscopy demonstrations"},{"id":"2285","name":"nanolithography"},{"id":"166968","name":"the Institute for Electronics and Nanotechnology"},{"id":"168357","name":"The School of Materials Science and Engineering"}],"core_research_areas":[],"news_room_topics":[],"event_categories":[{"id":"10377","name":"Career\/Professional development"},{"id":"1795","name":"Seminar\/Lecture\/Colloquium"}],"invited_audience":[{"id":"78751","name":"Undergraduate students"},{"id":"78761","name":"Faculty\/Staff"},{"id":"78771","name":"Public"},{"id":"174045","name":"Graduate students"}],"affiliations":[],"classification":[],"areas_of_expertise":[],"news_and_recent_appearances":[],"phone":[],"contact":[{"value":"\u003Cp\u003E\u003Ca href=\u0022mailto:devin.brown@ien.gatech.edu\u0022\u003Edevin.brown@ien.gatech.edu\u003C\/a\u003E\u003C\/p\u003E","format":"limited_html"}],"email":[],"slides":[],"orientation":[],"userdata":""}}}