This short course will cover essential microfabrication techniques including, photolithography, thin film deposition, etching, packaging, and characterization. Attendees will gain valuable experience by fabricating simple devices in one of the most advanced uni­versity cleanrooms in North America.

Attendance is open to the general technical community and is not limited to current Georgia Tech students or IMS users. Anyone interested in cleanroom fabrication techniques is strongly encouraged to attend this course. The course is suitable for both new and experienced researchers interested in micro-fabrication techniques and applications.

A course emphasis will be placed on IMS cleanroom resources, however, the concepts and techniques discussed are applicable to a broad array of research in this field.

Rates: *Rates include lunches on both days*

• Georgia Tech Rate: $200
• Academic and Government Rate: $400
• Industry Rate: $800