This PhD dissertation explores significant advancements in the thermal stability and calibration accuracy of MEMS (Micro-Electro-Mechanical Systems) devices, particularly focusing on the application of high-performance 4H-SiC (silicon carbide) and AlN (aluminum nitride) in MEMS resonators and gyroscopes. Moreover, the research provides a high-level exploration of the critical advancements in MEMS technology, focusing on enhancing thermal stability and calibration accuracy through innovative material applications and cutting-edge ML and DL techniques. The work presented in this dissertation collectively contributes to the development of highly stable and accurate MEMS resonators and gyroscopes, paving the way for their broader application in various high-stakes and everyday environments. These innovations ensure the continued evolution and reliability of MEMS technology, highlighting its importance in modern technological applications.