The objective of the proposed research is to investigate the potential of capacitive micromachined ultrasonic transducers (CMUTs) for transcranial focused ultrasound (tFUS) systems using microbubble (MB) aided operation through modeling and experimental studies. TFUS in combination with MB holds great potential for targeted drug delivery in the brain. As this technology advances in the clinic, the requirements for control of MB activity as well as highly sensitive spatial monitoring and broadband detection of MB dynamics to ensure safe and effective treatments are becoming more stringent. As part of the proposed work, the evaluation and optimization of CMUTs as receivers will be demonstrated. Then, CMUTs nonlinearity reduction for MB excitation will be investigated. Finally, the dual-mode operation of CMUTs at a small-scale tFUS system will be carried out.