The objective of the proposed research is to develop a novel 5G/mm-Wave-enabled mmID systems for next generation localized sensing systems building the framework for next-generation cyber-physical systems. In order to realize these future CPSs, the mmIDs used to form these systems need to be highly manufacturable, operate energy autonomously, have compact form factor, provide long-reading ranges with orientation-agnostic operation, and be able to be localized accurately to create a detailed CPS of an environment.Three specific topologies of backscatter tags operating in this 5G/mmWave bands are presented. The first technology presented is a chipless cross-polarized reflectarray wireless strain sensor presenting the first every off-axis structural health monitoring fully-passive sensor for local strain monitoring for both adhered or embedded form-factors. Along with the design and characterization of the wireless strain sensor, a multi-tag interrogation framework is presented for future ubiquitous structure health monitoring CPSs. The next technology is the first-ever retro-directive harmonic mmID comprised of dual Rotman lenses and a fully-passive frequency doubler circuit. The mmID is interrogated with a proof-of-concept harmonic frequency modulated continuous wave radar providing accurate long range ranging of the energy autonomous tag as well as sub-mm accuracy at medium range of the radar. The mmID is envisioned to provide ultra-long range operation future localized sensing and tracking applications up to multiple kilometers. The last technology builds on the previous two by combining a 3D lens with a backscattering RF ‘pixel’ array forming a camera-inspired semi-passive mmID. Two designs consisting of a single lens-based mmID and a multi-lens based mmID. The multi-lens mmID in particular combines both optical lens system design and mmWave antenna design to form a highly detectable mmID with a large solid angle of coverage in the top hemisphere of the mmID. The interrogation of the multi-lens-based mmID was conducted at long ranges and localized accurately even at highly oblique angles of interrogation. The work presented in this thesis present a step forward the creation of future 5G/mmWave-enabled mmID-based CPSs.