SENIC Technical Webinar Series: Session 6 - Etching at GT-IEN: A Review of Processes and Equipment

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May 28, 2020 | 11AM-12PM | SENIC Technical Webinar Series: Session 6 - Etching at GT-IEN: A Review of Processes and Equipment

Mikkel Thomas, Ph.D., Georgia Tech Institute for Electronics and Nanotechnology (GT-IEN)

"The Southeastern Nanotechnology Infrastructure Corridor (SENIC) housed at the Institute for Electronics and Nanotechnology at Georgia Tech is hosting a series of online technical seminars, from 11am - 12pm, open to the academic and industrial community with an interest in cleanroom fabrication and processing for materials, biological, and electronics research.

We invite you to join us at any of the lectures  by registering at the link at the bottom of the page. On the registration form, please check the seminars for which you are interested (you are not limited in the number) so that appropriate accompanying materials, if needed, are prepared."

Abstract: Etching is one of the fundamental building blocks of microelectronic fabrication. Removing material through chemical or physical means is an essential skill found in most microelectronics laboratories. The Institute for Electronics and Nanotechnology (IEN) at Georgia Tech offers a wide variety of tools and technologies to etch materials during a multitude of fabrication processes. Tools range from typical plasma enhanced etchers to vapor based etchers. With 15+ etch tools in the facility, IEN staff has the flexibility to configure each tool with a different selection of gases, which enables different etch capabilities and allow the IEN to segregate processes within the facility. In this seminar, a brief introduction to the tools and technologies available in the IEN cleanrooms will be presented. Common etching issues and concerns will also be discussed.

Bio: Dr. Mikkel Thomas has worked for the Institute for Electronics and Nanotechnology since 2008. He earned a Bachelor of Science in Electrical Engineering in 1997, a Master’s of Science in Electrical Engineering in 1999 and a Ph.D in Electrical Engineering with a specialization in Optoelectronics in 2008, all from the Georgia institute of Technology. Prior to his employment at Georgia Tech, Dr. Thomas worked at OptiComp Corporation located in Zephyr Cove, Nevada. His research at the company revolved around the development of a VCSEL based, integrated optical communication system for use in satellites and other aerospace applications. Since arriving at Georgia Tech, in the IEN, Dr. Thomas provides cleanroom processing support to the academic faculty and their graduate students. He also provides processing support and fabrication services for entities not directly affiliated with the institute. He is the current lab instructor for ChBE 4050.


Join the Online Event May 28st at this Link: https://bluejeans.com/553388236

Registration Link: https://tinyurl.com/IENexperts2



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  • Created By:Farlenthia Walker
  • Created:04/20/2020
  • Modified By:kkarunakaran3
  • Modified:04/29/2020