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Ph.D. Proposal Oral Exam - Pranav Gupta
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Title: Hermetically-Encapsulated Precision Accelerometer Contact Microphones For Wearable Medical Devices
Committee:
Dr. Ayazi, Advisor
Dr. Ansari, Chair
Dr. Inan
Abstract:
The objective of the proposed research is to design, fabricate and characterize a MEMS-based Accelerometer Contact Microphone (ACM) that enables wearable measurement of cardiovascular and cardiopulmonary sounds, providing a platform for longitudinal monitoring of vital health parameters. This work presents two designs of low noise, wide bandwidth out-of-plane accelerometer comprising sub-micron transduction gaps (270nm) electrodes implemented using HARPSS+ process, which are fabricated and characterized as a contact microphone.
Status
- Workflow status: Published
- Created by: Daniela Staiculescu
- Created: 12/06/2019
- Modified By: Daniela Staiculescu
- Modified: 12/06/2019
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