Nano@Tech: Resonant MEMS
Professor Oliver Brand
School of Electrical and Computer Engineering
Director, Institute for Electronics and Nanotechnology
The Georgia Institute of Technology

Abstract:The presentation discusses resonant MEMS and, in particular, resonant microsensors, in which the measurand affects a characteristic of the resonance behavior of a microstructure, such as its resonance frequency or quality factor. The seminar will cover the theoretical background of resonant MEMS and discuss different ways of how the measurand can interact with the resonance characteristics of a MEMS structure. The resonant MEMS concepts will be explained using a number of examples, including chemical sensors and magnetic field sensors.

Bio: Oliver Brand is a Professor in the School of Electrical and Computer Engineering and the Executive Director of the Institute for Electronics and Nanotechnology (IEN) at the Georgia Institute of Technology. He received his diploma degree in Physics from Technical University Karlsruhe, Germany in 1990 and his Ph.D. degree from ETH Zurich, Switzerland in 1994. From 1995 to 1997, he worked as a postdoctoral fellow at the Georgia Institute of Technology. From 1997 to 2002, he was a lecturer at ETH Zurich in Zurich, Switzerland and deputy director of the Physical Electronics Laboratory (PEL). Dr. Brand has co-authored more than 200 publications in scientific journals and conference proceedings. He is a co-editor of the Wiley-VCH book series Advanced Micro and Nanosystems and a member of the editorial board of Sensors and Materials. His research interests are in the areas of integrated microsystems, microsensors, MEMS fabrication technologies, and microsystem packaging.