Transient Polymers for Low-k Dielectrics and Decomposing Electronic Devices

Paul A. Kohl, Hercules, Inc./Thomas L. Gossage Chair and Regents' Professor
Georgia Institute of Technology, Chemical and Biomolecular Engineering
kohl@gatech.edu

Abstract:  Dielectric materials (i.e. insulators) provide critical functions throughout the packaging hierarchy, including on-chip dielectrics, package substrates, and printed wiring boards. Transient polymers, those which vaporize on command, can be used to form ultra low-k dielectrics, such as porous materials or air-cavities. Transient polymers can also be used as coatings or structural materials in electronic packages and devices enabling the disappearance of the device when the collection, recovery or disposal of the device is difficult.

In this presentation, the nature of transient polymers will be described including their synthesis, and physical properties. Transient polymers can be decomposed to the liquid or gaseous state when exposed to thermal, chemical or photo-chemical stimulus. The response time and type of stimulus will be described. Finally, several applications for transient polymers in the fabrication of unique devices, structures or packages will be described.     

Bio:  Paul Kohl received a Ph.D. from The University of Texas, in Chemistry in 1978. After graduation, Dr. Kohl was employed at AT&T Bell Laboratories in Murray Hill, NJ from 1978 to 1989. During that time, he was involved in new chemical processes for silicon and compound semiconductor devices and their packaging. In 1989, he joined the faculty of the Georgia Institute of Technology in the School of Chemical and Biomolecular Engineering, where he is currently a Regents' Professor and holder of the Hercules Inc./Thomas L. Gossage Chair. Dr. Kohl's research interests include new materials and processes for advanced interconnects for integrated circuits, and electrochemical energy devices for energy conversion and storage. He has 250 journal publication, 63 US patents, and more than 400 conference presentations. Dr. Kohl is the past Editor of the Journal of The Electrochemical Society and Electrochemical and Solid-State Letter, past Director of the MARCO Interconnect Focus Center, and past President of the Electrochemical Society.