{"692978":{"#nid":"692978","#data":{"type":"event","title":"From Data to Device: Advanced Electron Beam Lithography","body":[{"value":"\u003Cp\u003EJoin the Institute for Matter and Systems for an afternoon seminar exploring advanced electron beam lithography techniques and their applications in space science, semiconductor processing, photonics, and nanoscale device fabrication. Speakers from academia and industry will discuss the lithography workflow, from pattern preparation and equipment considerations to process optimization and finished devices.\u003C\/p\u003E\u003Cp\u003E\u003Cstrong\u003EDate:\u003C\/strong\u003E Wednesday, Oct. 21, 2026\u003Cbr\u003E\u003Cstrong\u003ETime:\u003C\/strong\u003E 1:30\u20134:45 p.m.\u003Cbr\u003E\u003Cstrong\u003ELocation:\u003C\/strong\u003E Marcus Nanotechnology Building, Conference Rooms 1116\u20131118\u003Cbr\u003E\u003Cstrong\u003EFormat:\u003C\/strong\u003E In person and online\u003C\/p\u003E\u003Ch2\u003EProgram\u003C\/h2\u003E\u003Cul\u003E\u003Cli class=\u0022ck-list-marker-bold\u0022 data-list-item-id=\u0022e2bba7b8e2d553d310e9fc59d35ef4ae1\u0022\u003E\u003Cstrong\u003E1:30 p.m. | Electron Beam Lithography Fabricated Gratings for Space Applications | Fabien Gris\u00e9, Penn State University\u003C\/strong\u003E\u003Cul\u003E\u003Cli data-list-item-id=\u0022e0f93c524f69ff26c2ab5f48db6f91ace\u0022\u003EFabien Gris\u00e9 will discuss the use of electron beam lithography to fabricate diffraction gratings for future space telescopes. The presentation will address nanoscale patterning, large-area writing, stitching control, resist and dose optimization, and fabrication considerations for X-ray, extreme-ultraviolet, and far-ultraviolet applications.\u003C\/li\u003E\u003C\/ul\u003E\u003C\/li\u003E\u003Cli class=\u0022ck-list-marker-bold\u0022 data-list-item-id=\u0022e853cdf6858af680d332b2c088f09dfba\u0022\u003E\u003Cstrong\u003E2:15 p.m. | Electron Beam Lithography from Elionix\u2019s Perspective | Lukas Stampfer, STS-Elionix\u003C\/strong\u003E\u003Cul\u003E\u003Cli data-list-item-id=\u0022eeac527e542d14e287b8876b4385c5937\u0022\u003ELukas Stampfer will provide a vendor\u2019s perspective on the inner workings of electron beam lithography systems, the technical trade-offs involved in their development, and strategies for addressing equipment-related effects that can influence exposure results.\u003C\/li\u003E\u003C\/ul\u003E\u003C\/li\u003E\u003Cli class=\u0022ck-list-marker-bold\u0022 data-list-item-id=\u0022efe7e4456ed21863f5afa65190286f276\u0022\u003E\u003Cstrong\u003E3 p.m. | Coffee Break\u003C\/strong\u003E\u003C\/li\u003E\u003Cli class=\u0022ck-list-marker-bold\u0022 data-list-item-id=\u0022e961668a71b237d8e2db2eae30767dba0\u0022\u003E\u003Cstrong\u003E3:15 p.m. | Advanced Data Preparation and Techniques for Optimized Patterning | Kaustubh Vyas, GenISys GmbH\u003C\/strong\u003E\u003Cul\u003E\u003Cli data-list-item-id=\u0022ef20a5fa6b9007278933f1bac240989fc\u0022\u003EKaustubh Vyas will examine the data preparation steps that help translate a design file into a successfully fabricated structure. Topics will include machine-specific fracturing, shot placement, writing order, field control, proximity-effect correction, simulation, and scanning electron microscopy-based metrology.\u003C\/li\u003E\u003C\/ul\u003E\u003C\/li\u003E\u003Cli class=\u0022ck-list-marker-bold\u0022 data-list-item-id=\u0022ec3e7d82289cd00c673378df36f02fa1b\u0022\u003E\u003Cstrong\u003E4 p.m. | Electron-Beam Lithography for Photonic Device Fabrication: Applications and Practical Considerations | Ashkan Zandi, Georgia Institute of Technology\u003C\/strong\u003E\u003Cul\u003E\u003Cli data-list-item-id=\u0022e25140c8d3e1fe15ad07fa5e65520c443\u0022\u003EAshkan Zandi will discuss the development and practical implementation of electron beam lithography processes for integrated optics, metaphotonic devices, and grayscale-fabricated three-dimensional structures. The presentation will highlight resist selection, exposure-dose optimization, proximity effects, pattern fidelity, development conditions, reproducibility, and fabrication yield.\u003C\/li\u003E\u003C\/ul\u003E\u003C\/li\u003E\u003Cli class=\u0022ck-list-marker-bold\u0022 data-list-item-id=\u0022ebad4b417f400e4c3d85e1b8af0229665\u0022\u003E\u003Cstrong\u003E4:45 p.m. | Adjourn\u003C\/strong\u003E\u003C\/li\u003E\u003C\/ul\u003E\u003Ch2\u003EAbout the Speakers\u003C\/h2\u003E\u003Cp\u003E\u003Cstrong\u003EFabien Gris\u00e9\u003C\/strong\u003E is an associate research professor in the Department of Astronomy and Astrophysics at Penn State University. His research focuses on diffraction-grating technology for future NASA space telescopes, including electron beam lithography fabrication for X-ray, extreme-ultraviolet, and far-ultraviolet gratings.\u003C\/p\u003E\u003Cp\u003E\u003Cstrong\u003ELukas Stampfer\u003C\/strong\u003E has served as an application engineer for European and North American customers at STS-Elionix since 2021. He earned a doctorate in quantum transport from the University of Copenhagen and a master\u2019s degree in condensed matter physics from the Technical University of Munich.\u003C\/p\u003E\u003Cp\u003E\u003Cstrong\u003EKaustubh Vyas\u003C\/strong\u003E works across applications engineering, product improvement, and technical sales at GenISys. His background includes III-V and silicon photonics, and his current work focuses on lithography data preparation, predictive simulation, and process improvement.\u003C\/p\u003E\u003Cp\u003E\u003Cstrong\u003EAshkan Zandi\u003C\/strong\u003E is a research faculty member in the School of Electrical and Computer Engineering at the Georgia Institute of Technology. His research spans nanofabrication, integrated photonics, metaphotonics, biosensors, quantum sensing, and biomedical engineering.\u003C\/p\u003E\u003Ch2\u003ESponsors\u003C\/h2\u003E\u003Cp\u003EThis seminar is sponsored by STS-Elionix and GenISys GmbH.\u003C\/p\u003E","summary":"","format":"limited_html"}],"field_subtitle":"","field_summary":[{"value":"\u003Cdiv\u003EJoin the Institute for Matter and Systems for an afternoon seminar exploring advanced electron beam lithography techniques and their applications in space science, semiconductor processing, photonics, and nanoscale device fabrication. Speakers from academia and industry will discuss the complete lithography workflow, from pattern preparation and equipment considerations to process optimization and finished devices.\u003C\/div\u003E","format":"limited_html"}],"field_summary_sentence":[{"value":"Join the Institute for Matter and Systems for an afternoon seminar exploring advanced electron beam lithography techniques and their applications in space science, semiconductor processing, photonics, and nanoscale device fabrication."}],"uid":"35272","created_gmt":"2026-10-02 13:42:43","changed_gmt":"2026-10-02 13:50:47","author":"aneumeister3","boilerplate_text":"","field_publication":"","field_article_url":"","field_event_time":{"event_time_start":"2026-10-21T13:30:00-04:00","event_time_end":"2026-10-21T16:45:00-04:00","event_time_end_last":"2026-10-21T16:45:00-04:00","gmt_time_start":"2026-10-21 17:30:00","gmt_time_end":"2026-10-21 20:45:00","gmt_time_end_last":"2026-10-21 20:45:00","rrule":null,"timezone":"America\/New_York"},"location":"Marcus Nanotechnology Building, Conference Rooms 1116\u20131118 and Virtual","extras":[],"related_links":[{"url":"https:\/\/events.teams.microsoft.com\/event\/c813370b-45d7-4edc-a7ea-28173c70d12a@482198bb-ae7b-4b25-8b7a-6d7f32faa083?source=copyLinkLegacyShareEventDialog","title":"Register To Attend Online"}],"groups":[{"id":"660369","name":"Matter and Systems"}],"categories":[],"keywords":[],"core_research_areas":[],"news_room_topics":[],"event_categories":[{"id":"194682","name":"Workshop"},{"id":"10377","name":"Career\/Professional development"},{"id":"1789","name":"Conference\/Symposium"},{"id":"194613","name":"Industry"},{"id":"1795","name":"Seminar\/Lecture\/Colloquium"}],"invited_audience":[{"id":"78761","name":"Faculty\/Staff"},{"id":"177814","name":"Postdoc"},{"id":"174045","name":"Graduate students"},{"id":"78751","name":"Undergraduate students"}],"affiliations":[],"classification":[],"areas_of_expertise":[],"news_and_recent_appearances":[],"phone":[],"contact":[{"value":"\u003Cp\u003E\u003Ca href=\u0022mailto:devin.brown@gatech.edu\u0022\u003EDevin Brown\u003C\/a\u003E\u003C\/p\u003E","format":"limited_html"}],"email":[],"slides":[],"orientation":[],"userdata":""}}}