{"691377":{"#nid":"691377","#data":{"type":"event","title":"Short Course | Electron Beam Lithography ","body":[{"value":"\u003Cp\u003EThis workshop was sponsored by Elionix.\u0026nbsp;\u003C\/p\u003E\u003Cp\u003EIt will cover:\u003C\/p\u003E\u003Cul\u003E\u003Cli data-list-item-id=\u0022ef7239749ca99003613f9e90f07df6603\u0022\u003EPattern design and data preparation using BEAMER\u003C\/li\u003E\u003Cli data-list-item-id=\u0022eb4e719b89e7224d68744f3b00c6ee726\u0022\u003EHigh-resolution writing on the Elionix ELS-G100 EBL system\u003C\/li\u003E\u003Cli data-list-item-id=\u0022e021b113528a6ac63428d183c09397451\u0022\u003EPattern transfer using etching techniques\u003C\/li\u003E\u003Cli data-list-item-id=\u0022eff11bbd40651a980ee5d6e02cd8a9417\u0022\u003EMetal lift-off processing\u003C\/li\u003E\u003C\/ul\u003E\u003Cp\u003EParticipants gain practical cleanroom experience in high-resolution lithography and processing, applicable to microelectronics, photonics, and quantum device fabrication.\u003C\/p\u003E\u003Cp\u003EWho should attend: Researchers, students, and industry professionals interested in nanoscale fabrication.\u003C\/p\u003E\u003Cp\u003ELocation: Marcus Nanotechnology building, Georgia Tech\u003C\/p\u003E\u003Cp\u003E\u003Cstrong\u003ERates: *Rates include lunches on both days*\u003C\/strong\u003E\u003C\/p\u003E\u003Cul\u003E\u003Cli data-list-item-id=\u0022edc6df810223e15a274e6d8823b950e92\u0022\u003EGeorgia Tech Rate: $200\u003C\/li\u003E\u003Cli data-list-item-id=\u0022ebd75c91cdb0f065b8d4d8216067299df\u0022\u003EAcademic and Government Rate: $400\u003C\/li\u003E\u003Cli data-list-item-id=\u0022ead272c2a441e6b982c31e03ea3f62da6\u0022\u003EIndustry Rate: $1000\u003C\/li\u003E\u003C\/ul\u003E\u003Cp\u003EOur next EBL workshop will take place October 20-21, 2026.\u003C\/p\u003E","summary":"","format":"limited_html"}],"field_subtitle":"","field_summary":[{"value":"\u003Cp\u003EThe Institute for Matter and Systems hosts a hands-on EBL Workshop designed to introduce participants to the full process flow from data preparation to pattern transfer and metallization.\u003C\/p\u003E\u003Cp\u003E\u003Cbr\u003E\u0026nbsp;\u003C\/p\u003E","format":"limited_html"}],"field_summary_sentence":[{"value":"This short course presented by the Institute for Matter \u0026 Systems"}],"uid":"36620","created_gmt":"2026-07-31 19:28:47","changed_gmt":"2026-07-31 19:30:46","author":"rgrieco6","boilerplate_text":"","field_publication":"","field_article_url":"","field_event_time":{"event_time_start":"2026-10-20T08:00:00-04:00","event_time_end":"2026-10-20T16:30:00-04:00","event_time_end_last":"2026-10-20T16:30:00-04:00","gmt_time_start":"2026-10-20 12:00:00","gmt_time_end":"2026-10-20 20:30:00","gmt_time_end_last":"2026-10-20 20:30:00","rrule":"RRULE:FREQ=DAILY;INTERVAL=1;COUNT=1","timezone":"America\/New_York"},"location":"Marcus Nanotechnology Building 1116-1118","extras":[],"related_links":[{"url":"https:\/\/epay.gatech.edu\/C20793_ustores\/web\/store_main.jsp?STOREID=317\u0026amp;SINGLESTORE=true","title":"Register here"}],"groups":[{"id":"660369","name":"Matter and Systems"}],"categories":[],"keywords":[{"id":"189814","name":"go-researchevents"}],"core_research_areas":[],"news_room_topics":[],"event_categories":[{"id":"26411","name":"Training\/Workshop"}],"invited_audience":[{"id":"194945","name":"Alumni"},{"id":"78761","name":"Faculty\/Staff"},{"id":"177814","name":"Postdoc"},{"id":"78771","name":"Public"},{"id":"174045","name":"Graduate students"},{"id":"78751","name":"Undergraduate students"}],"affiliations":[],"classification":[],"areas_of_expertise":[],"news_and_recent_appearances":[],"phone":[],"contact":[{"value":"\u003Cp\u003E\u003Ca href=\u0022mailto:dgajula3@gatech.edu\u0022\u003EDurga GaJula\u003C\/a\u003E\u003C\/p\u003E\u003Cp\u003E\u003Ca href=\u0022mailto:devin.brown@gatech.edu\u0022\u003EDevin Brown\u003C\/a\u003E\u003C\/p\u003E","format":"limited_html"}],"email":[],"slides":[],"orientation":[],"userdata":""}}}