{"690464":{"#nid":"690464","#data":{"type":"event","title":"Short Course | Electron Beam Lithography ","body":[{"value":"\u003Cp\u003EThis workshop was sponsored by Elionix.\u0026nbsp;\u003C\/p\u003E\u003Cp\u003E\u0026nbsp;\u003C\/p\u003E\u003Cp\u003EIt will cover:\u003C\/p\u003E\u003Cul\u003E\u003Cli data-list-item-id=\u0022e4f732a48c87020688e8fa5d3b2900325\u0022\u003EPattern design and data preparation using BEAMER\u003C\/li\u003E\u003Cli data-list-item-id=\u0022e65824975a19ffbbfe031c72c2762340b\u0022\u003EHigh-resolution writing on the Elionix ELS-G100 EBL system\u003C\/li\u003E\u003Cli data-list-item-id=\u0022e1452807eac4599b85d2f5865b8b2b9cf\u0022\u003EPattern transfer using etching techniques\u003C\/li\u003E\u003Cli data-list-item-id=\u0022e6123ae8315173fc04a8fc3c044808b84\u0022\u003EMetal lift-off processing\u003C\/li\u003E\u003C\/ul\u003E\u003Cp\u003EParticipants gain practical cleanroom experience in high-resolution lithography and processing, applicable to microelectronics, photonics, and quantum device fabrication.\u003C\/p\u003E\u003Cp\u003EWho should attend: Researchers, students, and industry professionals interested in nanoscale fabrication.\u003C\/p\u003E\u003Cp\u003ELocation: Marcus Nanotechnology building, Georgia Tech\u003C\/p\u003E\u003Cp\u003E\u003Cstrong\u003ERates: *Rates include lunches on both days*\u003C\/strong\u003E\u003C\/p\u003E\u003Cul\u003E\u003Cli data-list-item-id=\u0022ebcc9662dbc72f42bd355096b2add992a\u0022\u003EGeorgia Tech Rate: $200\u003C\/li\u003E\u003Cli data-list-item-id=\u0022e6997f57f7b28d9acff667618842c70ac\u0022\u003EAcademic and Government Rate: $400\u003C\/li\u003E\u003Cli data-list-item-id=\u0022ea19c11aaefa933a94dd4f686ec20778e\u0022\u003EIndustry Rate: $1000\u003C\/li\u003E\u003C\/ul\u003E\u003Cp\u003EOur next EBL workshop will take place June 29-30, 2026.\u003C\/p\u003E\u003Cp\u003E\u003Cstrong\u003ERegistration closes June 10, 2026.\u0026nbsp;\u003C\/strong\u003E\u003C\/p\u003E","summary":"","format":"limited_html"}],"field_subtitle":"","field_summary":[{"value":"\u003Cp\u003EThe Institute for Matter and Systems hosts a hands-on EBL Workshop designed to introduce participants to the full process flow from data preparation to pattern transfer and metallization.\u003C\/p\u003E\u003Cp\u003E\u003Cbr\u003E\u0026nbsp;\u003C\/p\u003E","format":"limited_html"}],"field_summary_sentence":[{"value":"This short course sponsored by Elionix"}],"uid":"36620","created_gmt":"2026-05-26 17:45:37","changed_gmt":"2026-05-26 17:47:40","author":"rgrieco6","boilerplate_text":"","field_publication":"","field_article_url":"","field_event_time":{"event_time_start":"2026-06-29T08:00:00-04:00","event_time_end":"2026-06-29T16:00:00-04:00","event_time_end_last":"2026-06-29T16:00:00-04:00","gmt_time_start":"2026-06-29 12:00:00","gmt_time_end":"2026-06-29 20:00:00","gmt_time_end_last":"2026-06-29 20:00:00","rrule":"RRULE:FREQ=DAILY;INTERVAL=1;COUNT=1","timezone":"America\/New_York"},"location":"Marcus Nanotechnology Building 1116-1118","extras":[],"related_links":[{"url":"https:\/\/epay.gatech.edu\/C20793_ustores\/web\/store_main.jsp?STOREID=317\u0026SINGLESTORE=true","title":"Register now"}],"groups":[{"id":"660369","name":"Matter and Systems"}],"categories":[],"keywords":[{"id":"189814","name":"go-researchevents"}],"core_research_areas":[],"news_room_topics":[],"event_categories":[{"id":"26411","name":"Training\/Workshop"}],"invited_audience":[{"id":"194945","name":"Alumni"},{"id":"78761","name":"Faculty\/Staff"},{"id":"177814","name":"Postdoc"},{"id":"78771","name":"Public"},{"id":"174045","name":"Graduate students"},{"id":"78751","name":"Undergraduate students"}],"affiliations":[],"classification":[],"areas_of_expertise":[],"news_and_recent_appearances":[],"phone":[],"contact":[{"value":"\u003Cp\u003E\u003Ca href=\u0022mailto:devin.brown@gatech.edu\u0022\u003EDevin Brown\u003C\/a\u003E\u003C\/p\u003E","format":"limited_html"}],"email":[],"slides":[],"orientation":[],"userdata":""}}}