{"686092":{"#nid":"686092","#data":{"type":"event","title":"Ph.D. Proposal Oral Exam - Jiayi Chen","body":[{"value":"\u003Cp\u003E\u003Cstrong\u003ETitle:\u0026nbsp; \u003C\/strong\u003E\u003Cem\u003EALD Deposition of Ferroelectric Perovskite Oxide Thin Films\u003C\/em\u003E\u003C\/p\u003E\u003Cp\u003E\u003Cstrong\u003ECommittee:\u0026nbsp;\u003C\/strong\u003E\u003C\/p\u003E\u003Cp\u003EDr.\u0026nbsp;Khan, Advisor\u0026nbsp;\u003C\/p\u003E\u003Cp\u003EDr. Losego, Co-Advisor\u003C\/p\u003E\u003Cp\u003EDr. Vogel, Chair\u003C\/p\u003E\u003Cp\u003EDr. Garten\u003C\/p\u003E","summary":"","format":"limited_html"}],"field_subtitle":"","field_summary":[{"value":"\u003Cp\u003EThe objective of the proposed research is to develop ALD process for polycrystalline BaTiO3 (BTO) thin films aimed at high-k gate oxide applications in next-generation transistors. The work focuses on establishing a clear understanding of the process \u2013 structure \u2013 property relationships in ALD BTO. We first investigated the chemistry and chemical reactions during deposition and crystallization. It is found that Ba is initially incorporated as Ba(OH)\u2082 in the as-grown films, which subsequently reacts with TiO\u2082 to form crystalline BTO upon annealing. However, Ba(OH)\u2082 readily converts to BaCO\u2083 upon exposure to ambient CO\u2082, introducing an undesirable kinetic barrier to crystallization. In addition, we developed the process for high-k BTO capacitors with Pt top and bottom electrodes, achieving a relative permittivity of 75 for 50 nm BTO films. Finally, future research directions include mitigating interfacial voids, scaling down the BTO thickness, and exploring doping strategies to further enhance dielectric performance\u003C\/p\u003E","format":"limited_html"}],"field_summary_sentence":[{"value":"ALD Deposition of Ferroelectric Perovskite Oxide Thin Films"}],"uid":"28475","created_gmt":"2025-10-29 21:38:47","changed_gmt":"2025-10-29 21:41:08","author":"Daniela Staiculescu","boilerplate_text":"","field_publication":"","field_article_url":"","field_event_time":{"event_time_start":"2025-11-14T09:00:00-05:00","event_time_end":"2025-11-14T11:00:00-05:00","event_time_end_last":"2025-11-14T11:00:00-05:00","gmt_time_start":"2025-11-14 14:00:00","gmt_time_end":"2025-11-14 16:00:00","gmt_time_end_last":"2025-11-14 16:00:00","rrule":null,"timezone":"America\/New_York"},"location":"Room 231A, MiRC","extras":[],"groups":[{"id":"434371","name":"ECE Ph.D. Proposal Oral Exams"}],"categories":[],"keywords":[{"id":"102851","name":"Phd proposal"},{"id":"1808","name":"graduate students"}],"core_research_areas":[],"news_room_topics":[],"event_categories":[{"id":"1788","name":"Other\/Miscellaneous"}],"invited_audience":[{"id":"78771","name":"Public"}],"affiliations":[],"classification":[],"areas_of_expertise":[],"news_and_recent_appearances":[],"phone":[],"contact":[],"email":[],"slides":[],"orientation":[],"userdata":""}}}