{"685860":{"#nid":"685860","#data":{"type":"event","title":"Short Course | Electron Beam Lithography ","body":[{"value":"\u003Cp\u003E\u003Cstrong\u003EThe Institute for Matter and Systems (IMS)\u003C\/strong\u003E at Georgia Tech will host a hands-on EBL Workshop designed to introduce participants to the full process flow from data preparation to pattern transfer and metallization.\u003C\/p\u003E\u003Cp\u003EThis workshop will cover:\u003C\/p\u003E\u003Cul\u003E\u003Cli\u003E\u003Cstrong\u003EPattern design and data preparation using BEAMER\u003C\/strong\u003E\u003C\/li\u003E\u003Cli\u003E\u003Cstrong\u003EHigh-resolution writing on the Elionix ELS-G100 EBL system\u003C\/strong\u003E\u003C\/li\u003E\u003Cli\u003E\u003Cstrong\u003EPattern transfer using etching techniques\u003C\/strong\u003E\u003C\/li\u003E\u003Cli\u003E\u003Cstrong\u003EMetal lift-off processing\u003C\/strong\u003E\u003C\/li\u003E\u003C\/ul\u003E\u003Cp\u003EParticipants will gain practical cleanroom experience in high-resolution lithography and processing, applicable to microelectronics, photonics, and quantum device fabrication.\u003C\/p\u003E\u003Cp\u003E\u0026nbsp;\u003C\/p\u003E\u003Cp\u003E\u003Cstrong\u003EWho should attend\u003C\/strong\u003E: Researchers, students, and industry professionals interested in nanoscale fabrication.\u003C\/p\u003E\u003Cp\u003E\u003Cstrong\u003ELocation:\u003C\/strong\u003E Marcus Nanotechnology building, Georgia Tech\u003C\/p\u003E\u003Cp\u003E\u003Cstrong\u003ERates: *Rates include lunches on both days*\u003C\/strong\u003E\u003C\/p\u003E\u003Cul\u003E\u003Cli\u003EGeorgia Tech Rate: $200\u003C\/li\u003E\u003Cli\u003EAcademic and Government Rate: $400\u003C\/li\u003E\u003Cli\u003EIndustry Rate: $1000\u003C\/li\u003E\u003C\/ul\u003E","summary":"","format":"limited_html"}],"field_subtitle":"","field_summary":[{"value":"\u003Cdiv\u003EHosted by the \u003Cstrong\u003EInstitute for Matter and Systems\u003C\/strong\u003E\u0026nbsp;at \u003Cstrong\u003EGeorgia Institute of Technology\u003C\/strong\u003E, this hands-on workshop offers a deep dive into the complete nanofabrication workflow \u2014 from pattern design to pattern transfer and metallization.\u003C\/div\u003E","format":"limited_html"}],"field_summary_sentence":[{"value":"Join us for the IMS Electron Beam Lithography (EBL) Workshop!"}],"uid":"36620","created_gmt":"2025-10-20 19:53:08","changed_gmt":"2025-10-20 19:54:43","author":"rgrieco6","boilerplate_text":"","field_publication":"","field_article_url":"","field_event_time":{"event_time_start":"2025-11-13T08:00:00-05:00","event_time_end":"2025-11-13T17:00:00-05:00","event_time_end_last":"2025-11-13T17:00:00-05:00","gmt_time_start":"2025-11-13 13:00:00","gmt_time_end":"2025-11-13 22:00:00","gmt_time_end_last":"2025-11-13 22:00:00","rrule":"RRULE:FREQ=DAILY;INTERVAL=1;COUNT=1","timezone":"America\/New_York"},"location":"Marcus Nanotechnology Building 1116","extras":[],"related_links":[{"url":"https:\/\/epay.gatech.edu\/C20793_ustores\/web\/store_main.jsp?STOREID=317\u0026SINGLESTORE=true","title":"Register here"}],"groups":[{"id":"660369","name":"Matter and Systems"}],"categories":[],"keywords":[{"id":"189814","name":"go-researchevents"}],"core_research_areas":[],"news_room_topics":[],"event_categories":[{"id":"26411","name":"Training\/Workshop"}],"invited_audience":[{"id":"78761","name":"Faculty\/Staff"},{"id":"177814","name":"Postdoc"},{"id":"78771","name":"Public"},{"id":"174045","name":"Graduate students"},{"id":"78751","name":"Undergraduate students"}],"affiliations":[],"classification":[],"areas_of_expertise":[],"news_and_recent_appearances":[],"phone":[],"contact":[{"value":"\u003Cp\u003E\u003Ca href=\u0022mailto:dgajula3@gatech.edu\u0022\u003EDurga GaJula\u003C\/a\u003E\u003C\/p\u003E","format":"limited_html"}],"email":[],"slides":[],"orientation":[],"userdata":""}}}