{"673987":{"#nid":"673987","#data":{"type":"event","title":"Special MEMS Industry Invited Lecture: High-Performance Fused-Silica Vibratory Micro Shell Resonator Gyroscope","body":[{"value":"\u003Cp\u003E\u003Cspan\u003E\u003Cspan\u003EJoin ECE and \u003Cspan\u003EIEN for a special Invited MEMS Industry Guest Lecture\u003C\/span\u003E: High-Performance Fused-Silica Vibratory Micro Shell Resonator Gyroscope with Enertia Microsystems\u003Cstrong\u003E \u003C\/strong\u003ECEO Dr. Jae Yoong Cho\u003Cstrong\u003E.\u003C\/strong\u003E\u003C\/span\u003E\u003C\/span\u003E\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cspan\u003E\u003Cspan\u003E\u003Cstrong\u003E\u003Cspan\u003EDate: \u003C\/span\u003E\u003C\/strong\u003E\u003Cspan\u003ETuesday, April 9, 2024\u003C\/span\u003E\u003C\/span\u003E\u003C\/span\u003E\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cspan\u003E\u003Cspan\u003E\u003Cstrong\u003E\u003Cspan\u003ETime:\u003C\/span\u003E\u003C\/strong\u003E\u003Cspan\u003E 12:30 p.m. \u2013 1:30 p.m.\u003C\/span\u003E\u003C\/span\u003E\u003C\/span\u003E\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cspan\u003E\u003Cspan\u003E\u003Cstrong\u003E\u003Cspan\u003ELocation:\u003C\/span\u003E\u003C\/strong\u003E\u003Cspan\u003E Virutal\u003C\/span\u003E\u003C\/span\u003E\u003C\/span\u003E\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cspan\u003E\u003Cspan\u003E\u003Cspan\u003ELink: \u003Ca href=\u0022https:\/\/gatech.zoom.us\/j\/92907911566\u0022\u003Ehttps:\/\/gatech.zoom.us\/j\/92907911566\u003C\/a\u003E \u003C\/span\u003E\u003C\/span\u003E\u003C\/span\u003E\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cstrong\u003EAbstract:\u003C\/strong\u003E Enertia Micro is commercializing a novel high-precision MEMS gyroscope technology called the birdbath resonator gyroscope (BRG) for rapidly emerging applications requiring excellent performance, small size, low power, and low cost (e.g. autonomous vehicles, industrial robots, consumer electronics, and aerospace applications). The BRG is the world\u2019s first fused-silica vibratory MEMS gyroscope and is a near-navigation-grade MEMS gyroscope (i.e. in-run bias stability \u0026lt;0.01 deg\/hr). Fused silica is a very attractive material due to very\u003Cbr \/\u003E\r\nlow thermoelastic damping (TED) (10-100x lower than silicon at frequency \u0026lt; 100 kHz). At U. Michigan, I invented a novel fused-silica high-temperature reflowing process to produce three- dimensional birdbath (i.e. half-toroidal) fused-silica shell resonators with mechanical quality factor (Q) of ~10 million at a frequency of 6-13 kHz and excellent mechanical uniformity. The BRG with a 10-mm micro birdbath resonator (i.e. BRG10 or Precision Shell Integrating Gyroscope) demonstrated a Q of 5.2 million, decay time constant of 296 seconds, an angle random walk of 0.00016 deg\/sqrt(hr), and an in-run bias stability of 0.0014 deg\/hr, which is the best- reported performance from MEMS gyroscopes to date [Cho20].\u003C\/p\u003E\r\n\r\n\u003Cp\u003E[Cho20] Cho et al., \u00220.00016 deg\/sqrt(hr) Angle Random Walk (ARW) and 0.0014 deg\/hr Bias Instability (BI) from a 5.2M-Q and 1-cm Precision Shell Integrating (PSI) Gyroscope\u0022, IEEE Inertial 2020.\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cstrong\u003EBio:\u003C\/strong\u003E Jae Yoong Cho is the CEO of Enertia Microsystems Inc. (San Leandro, CA). He received a Ph.D. degree in Electrical Engineering from the University of Michigan in 2012 (Advisor: Khalil Najafi). He was a postdoc (2012-2015) and an assistant research scientist (2015-2020) at the University of Michigan. In 2017, he co-founded Enertia Micro to commercialize the birdbath resonator gyroscope (BRG) technology, which he invented under the support of DARPA. His expertise includes design, fabrication, and control of high-performance MEMS inertial sensors.\u003C\/p\u003E\r\n","summary":"","format":"limited_html"}],"field_subtitle":"","field_summary":[{"value":"\u003Cp\u003EEnertia Microsystems Inc. CEO Jae Yoong Cho will give a talk about a novel high-precision MEMS gyroscope technology called the birdbath resonator gyroscope that can run rapidly emerging applications requiring excellent performance and low power.\u003C\/p\u003E\r\n","format":"limited_html"}],"field_summary_sentence":[{"value":"Enertia Microsystems Inc. CEO Jae Yoong Cho will give a talk about a novel high-precision MEMS gyroscope technology called the birdbath resonator gyroscope that can run rapidly emerging applications requiring excellent performance and low power."}],"uid":"36558","created_gmt":"2024-04-04 14:35:57","changed_gmt":"2024-04-04 14:55:37","author":"zwiniecki3","boilerplate_text":"","field_publication":"","field_article_url":"","field_event_time":{"event_time_start":"2024-04-09T12:30:00-04:00","event_time_end":"2024-04-09T13:30:00-04:00","event_time_end_last":"2024-04-09T13:30:00-04:00","gmt_time_start":"2024-04-09 16:30:00","gmt_time_end":"2024-04-09 17:30:00","gmt_time_end_last":"2024-04-09 17:30:00","rrule":null,"timezone":"America\/New_York"},"location":"Virtual","extras":[],"groups":[{"id":"1255","name":"School of Electrical and Computer Engineering"}],"categories":[],"keywords":[{"id":"193618","name":"MEMS, Lecture"}],"core_research_areas":[],"news_room_topics":[],"event_categories":[],"invited_audience":[],"affiliations":[],"classification":[],"areas_of_expertise":[],"news_and_recent_appearances":[],"phone":[],"contact":[{"value":"\u003Cp\u003EAzadeh\u0026nbsp;Ansari\u003C\/p\u003E\r\n\r\n\u003Cp\u003Eazadeh.ansari@ece.gatech.edu\u003C\/p\u003E\r\n","format":"limited_html"}],"email":[],"slides":[],"orientation":[],"userdata":""}}}