{"673985":{"#nid":"673985","#data":{"type":"event","title":"Special MEMS Industry Invited Lecture | High-Performance Fused-Silica Vibratory Micro Shell Resonator Gyroscope","body":[{"value":"\u003Cp\u003E\u003Cspan\u003E\u003Cspan\u003E\u003Cspan\u003E\u003Cspan\u003E\u003Cstrong\u003E\u003Cspan\u003E\u003Cspan\u003E\u003Cspan\u003EAbstract: \u003C\/span\u003E\u003C\/span\u003E\u003C\/span\u003E\u003C\/strong\u003E\u003Cspan\u003E\u003Cspan\u003E\u003Cspan\u003EEnertia Micro is commercializing a novel high-precision MEMS gyroscope technology called the birdbath resonator gyroscope (BRG) for rapidly emerging applications requiring excellent performance, small size, low power, and low cost (\u003Cem\u003Ee.g.\u003C\/em\u003E autonomous vehicles, industrial robots, consumer electronics, and aerospace applications).\u0026nbsp; The BRG is the world\u2019s first fused-silica vibratory MEMS gyroscope and is a near-navigation-grade MEMS gyroscope \u003Cem\u003E(i.e.\u003C\/em\u003E in-run bias stability \u0026lt; 0.01 deg\/hr).\u0026nbsp; Fused silica is a very attractive material due to very low thermoelastic damping (TED) (10-100x lower than silicon at frequency \u0026lt; 100 kHz).\u0026nbsp; At U. Michigan, I invented a novel fused-silica high-temperature reflowing process to produce three-dimensional birdbath (\u003Cem\u003Ei.e.\u003C\/em\u003E half-toroidal) fused-silica shell resonators with mechanical quality factor (\u003Cem\u003EQ\u003C\/em\u003E) of ~10 million at a frequency of 6-13 kHz and excellent mechanical uniformity.\u0026nbsp; The BRG with a 10-mm micro birdbath resonator (\u003Cem\u003Ei.e. \u003C\/em\u003EBRG10 or Precision Shell Integrating Gyroscope) demonstrated a \u003Cem\u003EQ\u003C\/em\u003E of 5.2 million, decay time constant of 296 seconds, an angle random walk of 0.00016 deg\/sqrt(hr), and an in-run bias stability of 0.0014 deg\/hr, which is the best-reported performance from MEMS gyroscopes to date [Cho20].\u003C\/span\u003E\u003C\/span\u003E\u003C\/span\u003E\u003C\/span\u003E\u003C\/span\u003E\u003C\/span\u003E\u003C\/span\u003E\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cspan\u003E\u003Cspan\u003E\u003Cspan\u003E\u003Cspan\u003E\u003Cspan\u003E\u003Cspan\u003E\u003Cspan\u003E[Cho20] Cho et al., \u00220.00016 deg\/sqrt(hr) Angle Random Walk (ARW) and 0.0014 deg\/hr Bias Instability (BI) from a 5.2M-Q and 1-cm Precision Shell Integrating (PSI) Gyroscope\u0022, IEEE Inertial 2020.\u003C\/span\u003E\u003C\/span\u003E\u003C\/span\u003E\u003C\/span\u003E\u003C\/span\u003E\u003C\/span\u003E\u003C\/span\u003E\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cspan\u003E\u003Cspan\u003E\u003Cspan\u003E\u003Cspan\u003E\u003Cstrong\u003E\u003Cspan\u003E\u003Cspan\u003E\u003Cspan\u003EBio: \u003C\/span\u003E\u003C\/span\u003E\u003C\/span\u003E\u003C\/strong\u003E\u003Cspan\u003E\u003Cspan\u003E\u003Cspan\u003EJae Yoong Cho is the CEO of Enertia Microsystems Inc. (San Leandro, CA).\u0026nbsp; He received a Ph.D. degree in Electrical Engineering from the University of Michigan in 2012 (Advisor: Khalil Najafi).\u0026nbsp; He was a postdoc (2012-2015) and an assistant research scientist (2015-2020) at the University of Michigan.\u0026nbsp; In 2017, he co-founded Enertia Micro to commercialize the birdbath resonator gyroscope (BRG) technology, which he invented under the support of DARPA. \u0026nbsp;His expertise includes design, fabrication, and control of high-performance MEMS inertial sensors.\u0026nbsp; \u003C\/span\u003E\u003C\/span\u003E\u003C\/span\u003E\u003C\/span\u003E\u003C\/span\u003E\u003C\/span\u003E\u003C\/span\u003E\u003C\/p\u003E\r\n","summary":"","format":"limited_html"}],"field_subtitle":"","field_summary":[{"value":"\u003Cp\u003EFeaturing Jae Yoong Cho, CEO of Enertia Microsystems\u003C\/p\u003E\r\n","format":"limited_html"}],"field_summary_sentence":[{"value":"Featuring Jae Yoong Cho, CEO of Enertia Microsystems"}],"uid":"35272","created_gmt":"2024-04-04 14:33:23","changed_gmt":"2024-04-04 14:36:31","author":"aneumeister3","boilerplate_text":"","field_publication":"","field_article_url":"","field_event_time":{"event_time_start":"2024-04-09T12:30:00-04:00","event_time_end":"2024-04-09T13:30:00-04:00","event_time_end_last":"2024-04-09T13:30:00-04:00","gmt_time_start":"2024-04-09 16:30:00","gmt_time_end":"2024-04-09 17:30:00","gmt_time_end_last":"2024-04-09 17:30:00","rrule":null,"timezone":"America\/New_York"},"extras":[],"related_links":[{"url":"https:\/\/gatech.zoom.us\/j\/92907911566","title":"Zoom Meeting"}],"groups":[{"id":"197261","name":"Institute for Electronics and Nanotechnology"},{"id":"217141","name":"Georgia Tech Materials Institute"}],"categories":[],"keywords":[{"id":"187433","name":"go-ien"}],"core_research_areas":[],"news_room_topics":[],"event_categories":[{"id":"1795","name":"Seminar\/Lecture\/Colloquium"}],"invited_audience":[{"id":"78761","name":"Faculty\/Staff"},{"id":"174045","name":"Graduate students"},{"id":"177814","name":"Postdoc"},{"id":"78751","name":"Undergraduate students"}],"affiliations":[],"classification":[],"areas_of_expertise":[],"news_and_recent_appearances":[],"phone":[],"contact":[{"value":"\u003Cp\u003E\u003Ca href=\u0022mailto:azadeh.ansari@ece.gatech.edu\u0022\u003EAzadeh Ansari\u003C\/a\u003E\u003C\/p\u003E\r\n","format":"limited_html"}],"email":[],"slides":[],"orientation":[],"userdata":""}}}