{"632095":{"#nid":"632095","#data":{"type":"event","title":"CANCELLED: IEN Technical Seminar: Electron Beam Lithography","body":[{"value":"\u003Ch3\u003E\u003Cstrong\u003ECANCELLED!!\u003C\/strong\u003E\u003C\/h3\u003E\r\n\r\n\u003Ch3\u003EThe Institute for Electronics and Nanotechnology Presents E-Beam Lithography\u003C\/h3\u003E\r\n\r\n\u003Cp\u003EIn this seminar participants will learn about current and emerging techniques in E-Beam lithography for various research disciplines.\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cstrong\u003ECourse Schedule with Approximate Times:\u003C\/strong\u003E\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cbr \/\u003E\r\n\u0026bull;12:00pm - 1:00pm \u0026quot;Forward Looking Applications andResearch with Electron Beam Lithography\u0026quot; - Devin K. Brown: Senior Research Engineer, Georgia Tech\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cbr \/\u003E\r\n\u0026bull;1:00pm - 2:00pm \u0026quot;Elionix Electron Beam LithographyTechnology\u0026quot; - Taichi Suhara: Technical Support Engineer, ELIONIX Inc., Japan\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cem\u003E\u003Cstrong\u003EPizza Lunch Provided to Registered Attendees\u003C\/strong\u003E\u003C\/em\u003E\u003C\/p\u003E\r\n\r\n\u003Cp\u003ETo register for this class please use the following link:\u003Cbr \/\u003E\r\n\u003Cstrong\u003E\u003Ca href=\u0022https:\/\/tinyurl.com\/elitho2020\u0022\u003Ehttps:\/\/tinyurl.com\/elitho2020\u003C\/a\u003E\u003C\/strong\u003E\u003C\/p\u003E\r\n\r\n\u003Cp\u003EFor More Information, please contact: Devin K. Brown\u003Cbr \/\u003E\r\ndevin.brown@ien.gatech.edu\u003Cbr \/\u003E\r\n404.385.5370\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u0026nbsp;\u003C\/p\u003E\r\n","summary":null,"format":"limited_html"}],"field_subtitle":"","field_summary":"","field_summary_sentence":[{"value":"Due to COVID19 concerns, this events has been cancelled."}],"uid":"27863","created_gmt":"2020-02-04 18:53:28","changed_gmt":"2020-03-12 17:00:08","author":"Christa Ernst","boilerplate_text":"","field_publication":"","field_article_url":"","field_event_time":{"event_time_start":"2020-03-13T13:00:00-04:00","event_time_end":"2020-03-13T15:00:00-04:00","event_time_end_last":"2020-03-13T15:00:00-04:00","gmt_time_start":"2020-03-13 17:00:00","gmt_time_end":"2020-03-13 19:00:00","gmt_time_end_last":"2020-03-13 19:00:00","rrule":null,"timezone":"America\/New_York"},"extras":[],"groups":[{"id":"213791","name":"3D Systems Packaging Research Center"},{"id":"198081","name":"Georgia Electronic Design Center (GEDC)"},{"id":"197261","name":"Institute for Electronics and Nanotechnology"},{"id":"1271","name":"NanoTECH"},{"id":"213771","name":"The Center for MEMS and Microsystems Technologies"}],"categories":[],"keywords":[{"id":"46201","name":"3D Nanolithography"},{"id":"181923","name":"e-beam lithography"},{"id":"107","name":"Nanotechnology"},{"id":"12701","name":"Institute for Electronics and Nanotechnology"},{"id":"173609","name":"cleanroom techniques"},{"id":"142931","name":"device fabrication"}],"core_research_areas":[],"news_room_topics":[],"event_categories":[{"id":"10377","name":"Career\/Professional development"},{"id":"1795","name":"Seminar\/Lecture\/Colloquium"}],"invited_audience":[{"id":"78761","name":"Faculty\/Staff"},{"id":"177814","name":"Postdoc"},{"id":"78771","name":"Public"},{"id":"174045","name":"Graduate students"},{"id":"78751","name":"Undergraduate students"}],"affiliations":[],"classification":[],"areas_of_expertise":[],"news_and_recent_appearances":[],"phone":[],"contact":[],"email":[],"slides":[],"orientation":[],"userdata":""}}}