Committee:

Dr. Farrokh Ayazi, ECE, Chair , Advisor

Dr. Oliver Brand, ECE

Dr. Azadeh Ansari, ECE

Dr. Hua Wang, ECE

Dr. Peter Hesketh, ME

Abstract:

This research involves the design and fabrication processes for developing high Q and high frequency MEMS inertial sensors, primarily thick epitaxially grown polysilicon BAW disk MEMS gyroscopes; wafer-level packaged MEMS resonators for timing applications; and high bandwidth resonant MEMS accelerometer prototypes using a combined piezo-HARPSS process, to meet the demand of the surging growth of IoT technology. These new fabrication techniques enable high performance of these sensors, by overcoming the current limitations, and can be used in emerging applications in healthcare, smart cars, 5G and other smart sensors.