{"618918":{"#nid":"618918","#data":{"type":"event","title":"Ph.D. Dissertation Defense - Chang-Shun Liu","body":[{"value":"\u003Cp\u003E\u003Cstrong\u003ETitle\u003C\/strong\u003E\u003Cem\u003E:\u0026nbsp; \u003C\/em\u003E\u003Cem\u003EAdvanced Single-chip Temperature Stabilization System for MEMS Resonators and Gyroscopes\u003C\/em\u003E\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cstrong\u003ECommittee:\u003C\/strong\u003E\u003C\/p\u003E\r\n\r\n\u003Cp\u003EDr. Farrokh Ayazi, ECE, Chair , Advisor\u003C\/p\u003E\r\n\r\n\u003Cp\u003EDr. Arijit Raychowdhury, ECE\u003C\/p\u003E\r\n\r\n\u003Cp\u003EDr. Hua Wang, ECE\u003C\/p\u003E\r\n\r\n\u003Cp\u003EDr. John Cressler, ECE\u003C\/p\u003E\r\n\r\n\u003Cp\u003EDr. Peter Hesketh, ME\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cstrong\u003EAbstract: \u003C\/strong\u003E\u003C\/p\u003E\r\n\r\n\u003Cp\u003EThe main objective of this research is to develop temperature and frequency stabilization techniques for silicon MEMS oven-controlled crystal oscillators (MEMS OCXO) with high-frequency stability. The device is built upon an ovenized platform that uses a micro-heater to adjust the temperature of the resonator. Structural resistance-based temperature sensing is used to improve the self-temperature monitoring accuracy of the silicon MEMS resonator. An analog feedback micro-oven control loop and a feedforward digital calibration scheme are developed for a 77MHz MEMS oscillator, which achieves a \u0026plusmn;0.3ppm frequency stability from -25\u0026deg;C to 85\u0026deg;C. This temperature stabilization technique is also applied to silicon MEMS mode-matched vibratory x\/y-axis and z-axis gyroscopes on a single chip. The temperature-induced frequency change, scale factor and output bias variations are all reduced significantly. The complete interface circuit for the single-chip three axes gyroscopes were also developed with an innovative trans-impedance amplifier to reduce the input-referred noise. For the first time, the simultaneous operation of mode-matched vibratory 3-axis MEMS gyroscopes on a single chip is demonstrated.\u003C\/p\u003E\r\n","summary":null,"format":"limited_html"}],"field_subtitle":"","field_summary":"","field_summary_sentence":[{"value":"Advanced Single-chip Temperature Stabilization System for MEMS Resonators and Gyroscopes "}],"uid":"28475","created_gmt":"2019-03-06 21:57:39","changed_gmt":"2019-03-06 21:57:39","author":"Daniela Staiculescu","boilerplate_text":"","field_publication":"","field_article_url":"","field_event_time":{"event_time_start":"2019-03-25T12:00:00-04:00","event_time_end":"2019-03-25T14:00:00-04:00","event_time_end_last":"2019-03-25T14:00:00-04:00","gmt_time_start":"2019-03-25 16:00:00","gmt_time_end":"2019-03-25 18:00:00","gmt_time_end_last":"2019-03-25 18:00:00","rrule":null,"timezone":"America\/New_York"},"extras":[],"groups":[{"id":"434381","name":"ECE Ph.D. Dissertation Defenses"}],"categories":[],"keywords":[{"id":"100811","name":"Phd Defense"},{"id":"1808","name":"graduate students"}],"core_research_areas":[],"news_room_topics":[],"event_categories":[{"id":"1788","name":"Other\/Miscellaneous"}],"invited_audience":[{"id":"78771","name":"Public"}],"affiliations":[],"classification":[],"areas_of_expertise":[],"news_and_recent_appearances":[],"phone":[],"contact":[],"email":[],"slides":[],"orientation":[],"userdata":""}}}