{"613364":{"#nid":"613364","#data":{"type":"event","title":"Ph.D. Dissertation Defense - Benoit Hamelin","body":[{"value":"\u003Cp\u003E\u003Cstrong\u003ETitle\u003C\/strong\u003E\u003Cem\u003E:\u0026nbsp; \u003C\/em\u003E\u003Cem\u003ESilicon Carbide (SiC) and Silicon Dioxide (SiO2) Michromechanical Resonators with Ultra-low Dissipation\u003C\/em\u003E\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cstrong\u003ECommittee:\u003C\/strong\u003E\u003C\/p\u003E\r\n\r\n\u003Cp\u003EDr. Farrokh Ayazi, ECE, Chair , Advisor\u003C\/p\u003E\r\n\r\n\u003Cp\u003EDr. Pamela Bhatti, ECE\u003C\/p\u003E\r\n\r\n\u003Cp\u003EDr. Oliver Brand, ECE\u003C\/p\u003E\r\n\r\n\u003Cp\u003EDr. Azadeh Ansari, ECE\u003C\/p\u003E\r\n\r\n\u003Cp\u003EDr. Peter Hesketh, ME\u003C\/p\u003E\r\n\r\n\u003Cp\u003E\u003Cstrong\u003EAbstract: \u003C\/strong\u003E\u003C\/p\u003E\r\n\r\n\u003Cp\u003ESilicon carbide (SiC) and silicon dioxide (SiO2) are both promising materials in the\u0026nbsp;quest for micromechanical resonators with ultra-low dissipation. Because of the legacy of\u0026nbsp;the IC industry and ease of fabrication, silicon (Si) has been the prominent structural\u0026nbsp;material for MEMS devices. However, from the perspective of dissipation, SiC\u0026nbsp;and\u0026nbsp;SiO2\u0026nbsp;may outperform Si: Akhiezer damping (AKE) in SiC and thermoelastic damping (TED) in\u0026nbsp;SiO2 are greatly reduced\u0026nbsp;compared\u0026nbsp;to Si. The implementation of high-Q SiC and SiO2-\u0026nbsp;based micromechanical resonators\u0026nbsp;involves\u0026nbsp;several challenges. This dissertation attempts\u0026nbsp;to address those challenges to facilitate the deployment of high-performance resonant\u0026nbsp;sensors made from SiC and SiO2 for high-performance applications in harsh environments.\u003C\/p\u003E\r\n","summary":null,"format":"limited_html"}],"field_subtitle":"","field_summary":"","field_summary_sentence":[{"value":"Silicon Carbide (SiC) and Silicon Dioxide (SiO2) Michromechanical Resonators with Ultra-low Dissipation "}],"uid":"28475","created_gmt":"2018-10-26 19:50:16","changed_gmt":"2018-10-26 19:50:16","author":"Daniela Staiculescu","boilerplate_text":"","field_publication":"","field_article_url":"","field_event_time":{"event_time_start":"2018-11-05T11:00:00-05:00","event_time_end":"2018-11-05T13:00:00-05:00","event_time_end_last":"2018-11-05T13:00:00-05:00","gmt_time_start":"2018-11-05 16:00:00","gmt_time_end":"2018-11-05 18:00:00","gmt_time_end_last":"2018-11-05 18:00:00","rrule":null,"timezone":"America\/New_York"},"extras":[],"groups":[{"id":"434381","name":"ECE Ph.D. Dissertation Defenses"}],"categories":[],"keywords":[{"id":"100811","name":"Phd Defense"},{"id":"1808","name":"graduate students"}],"core_research_areas":[],"news_room_topics":[],"event_categories":[{"id":"1788","name":"Other\/Miscellaneous"}],"invited_audience":[{"id":"78771","name":"Public"}],"affiliations":[],"classification":[],"areas_of_expertise":[],"news_and_recent_appearances":[],"phone":[],"contact":[],"email":[],"slides":[],"orientation":[],"userdata":""}}}