Direct Write Processing of 3D Composite Nanostructures and 2D Electronic Materials using Focused Beams of Molecules and Electrons

Prof. Andrei Fedorov - School of Mechanical Engineering, Georgia Tech

Abstract: Focused Electron Beam Induced Processing (FEBIP) is a powerful method for atom-by-atom fabrication of topologically complex nanostructures from a variety of materials. It has potential to provide a comprehensive processing environment for emerging electronic and quantum devices based on 2D materials. We are developing a family of multi-mode energized micro/nano-jet techniques for local precursor delivery to resolve the FEBID challenges and to expand the range of useful precursors from gas to liquid phase for broader FEBIP applications. Energized micro/nano-jets of thermally or electro-kinetically energized precursors in both gas and liquid phase provide unique capabilities for localized delivery of precursor molecules to the substrate, thus establishing locally controlled deposition/etching site for FEBIP. Understanding of fascinating and interacting chemistry and physics on the most fundamental level will be discussed as a route to develop new FEBIP modes and applications to emerging electronic and quantum devices based on 2D materials.

Bio: Andrei G. Fedorov is Rae S. and Frank H.  Chaired Professor in the School of Mechanical Engineering and the Petit Institute for Bioengineering and Biosciences at Georgia Tech. His current research focuses on electron-beam-mediated nanomanufacturing, MEMS-enabled bioanalytical instrumentation, thermal management of high performance electronics, and power generation with synergetic CO2 capture. Fedorov has authored/co-authored over 200 archival articles in premier technical journals. His research has led to development of new technologies for various applications, resulting in over 40 issued US patents and pending patent applications. For his inventions of biomedical devices, the World Technology Network (WTN), in cooperation with AAAS Science Magazine, CNN, and leading technology companies, selected Fedorov as a WTN Associate and one of the twenty-five “most innovative people and organizations in the science and technology world” nominated for the 2005 World Technology Award in Health and Medicine. He was recognized with the US National Aeronautics and Space Administration (NASA) Invention & Contribution Board Award for development of catalytic reactor technologies, as well as multiple inventor recognition awards from the Semiconductor Research Corporation (SRC) and Microelectronics Advanced Research Corporation (MARCO).