Magnetron Sputtering Systems for Thin Film Applications: Tools Optimized for Chalcogenide and Reactive Sputtering Applications

Event Details
  • Date/Time:
    • Monday June 24, 2019
      12:30 pm - 1:30 pm
  • Location: Pettit Microelectronics Building 102A | 791 Atlantic Drive | Atlanta GA | 30332
  • Phone:
  • URL:
  • Email:
  • Fee(s):
    N/A
  • Extras:
    Free food
Contact

hang.chen@ien.gatech.edu

Summaries

Summary Sentence: Magnetron sputtering is a high-rate vacuum coating technique that allows the deposition of many types of materials, including metals and ceramics, onto as many types of substrate materials

Full Summary: No summary paragraph submitted.

Related Files
Magnetron Sputtering Systems for Thin Film Applications: Tools Optimized for Chalcogenide and Reactive Sputtering Applications


Mike Hale, Sales Manager AJA International, Inc.
Monday, Jun. 24th @ 12:30PM | Pettit Microelectronics Building 102A

 

Magnetron sputtering is a high-rate vacuum coating technique that allows the deposition of many types of materials, including metals and ceramics, onto as many types of substrate materials by the use of a specially formed magnetic field applied to a diode sputtering target. It allows a faster deposition rate at lower pressures compared with other techniques and is able to create strongly adhesive coatings on complex geometries including those made of heat-sensitive substrates such as polymers.*

Seminar attendees will be provided pizza and drinks during the talk.

Additional Information

In Campus Calendar
Yes
Groups

3D Systems Packaging Research Center, Georgia Electronic Design Center (GEDC), Institute for Electronics and Nanotechnology, NanoTECH, The Center for MEMS and Microsystems Technologies

Invited Audience
Faculty/Staff, Postdoc, Public, Graduate students, Undergraduate students
Categories
Career/Professional development, Seminar/Lecture/Colloquium
Keywords
Institute for Electronics and Nanotechnology, cleanroom techniques, deposition techniques, Materials Engineering, Nanotechnology, fabrication techniques, cleanroom training, microelectronics, nanostructure, nanopatterning
Status
  • Created By: Christa Ernst
  • Workflow Status: Published
  • Created On: Jun 20, 2019 - 12:04pm
  • Last Updated: Jun 20, 2019 - 12:05pm