Plasma Etching Probe Device

Plasma Etching Probe Device

Georgia Tech graduate research assistant Mason Chilmonczyk examines a device after a plasma etch step in a reactive ion etching tool. The work was being done in the Institute of Electronics and Nanotechnology’s Marcus Building clean room. (Credit: Rob Felt, Georgia Tech)

Additional Information


Research Horizons

Research, Chemistry and Chemical Engineering, Life Sciences and Biology
plasma etch, Dynamic Mass Spectrometry Probe
  • Created By: John Toon
  • Workflow Status: Draft
  • Created On: Oct 10, 2018 - 4:33pm
  • Last Updated: Oct 10, 2018 - 4:33pm