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Ph.D. Proposal Oral Exam - Benoit Hamelin

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Title:  Frequency Control of High-Q MEMS Resonators and Resonant Gyroscopes via Stiffness Trimming

Committee: 

Dr. Ayazi, Advisor       

Dr. Bhatti, Chair

Dr. Brand

Abstract: The objective of this proposal is to investigate and develop novel frequency control techniques based on stiffness trimming for high quality factor MEMS resonant sensors. In a first effort, energy confinement via out-of-plane curvature discontinuities have been investigated to isolate the vibrating structure from its lossy anchor. In a second and more general effort, which is at the heart of this research, pulsed laser stiffness trimming (PLST) of Germanium-loaded Single Crystal Silicon resonators has been explored. The main result is that PLST can shift frequencies with record-high resolution while imparting only a negligible impact on high Q resonators.

Status

  • Workflow Status:Published
  • Created By:Daniela Staiculescu
  • Created:05/25/2016
  • Modified By:Fletcher Moore
  • Modified:10/07/2016

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